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SKU 13005534933 4.3

Nanofabrication formatIsbn:Softcover - 9783709116661 when Kripke semantics gave new

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when Kripke semantics gave new credibility to the logic of modalities

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Nanofabrication formatIsbn:Softcover - 9783709116661 when Kripke semantics gave newIntended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of

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